ULSI Process Integration II

ULSI Process Integration II
Author: Cor L. Claeys
Publisher: The Electrochemical Society
Total Pages: 636
Release: 2001
Genre: Technology & Engineering
ISBN: 9781566773089


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ULSI Process Integration 7

ULSI Process Integration 7
Author: C. Claeys
Publisher: The Electrochemical Society
Total Pages: 429
Release: 2011
Genre:
ISBN: 1607682613


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ULSI Process Integration 6

ULSI Process Integration 6
Author: C. Claeys
Publisher: The Electrochemical Society
Total Pages: 547
Release: 2009-09
Genre: Integrated circuits
ISBN: 1566777445


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ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).

ULSI Process Integration 5

ULSI Process Integration 5
Author: Cor L. Claeys
Publisher: The Electrochemical Society
Total Pages: 509
Release: 2007
Genre: Integrated circuits
ISBN: 1566775728


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The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.

ULSI Process Integration III

ULSI Process Integration III
Author: Electrochemical Society. Meeting
Publisher: The Electrochemical Society
Total Pages: 620
Release: 2003
Genre: Technology & Engineering
ISBN: 9781566773768


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Microelectronics, Microsystems and Nanotechnology

Microelectronics, Microsystems and Nanotechnology
Author: Androula G. Nassiopoulou
Publisher: World Scientific
Total Pages: 409
Release: 2001
Genre: Technology & Engineering
ISBN: 9810247699


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This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.

Microelectronics, Microsystems And Nanotechnology: Papers Presented Of At Mmn 2000

Microelectronics, Microsystems And Nanotechnology: Papers Presented Of At Mmn 2000
Author: Androula G Nassiopoulou
Publisher: World Scientific
Total Pages: 409
Release: 2001-10-19
Genre: Technology & Engineering
ISBN: 9814489999


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This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.

Microelectronics Technology and Devices, SBMICRO 2002

Microelectronics Technology and Devices, SBMICRO 2002
Author: Electrochemical Society. Electronics Division
Publisher: The Electrochemical Society
Total Pages: 506
Release: 2002
Genre: Technology & Engineering
ISBN: 9781566773287


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ULSI Process Integration

ULSI Process Integration
Author: Cor L. Claeys
Publisher: The Electrochemical Society
Total Pages: 408
Release: 1999
Genre: Computers
ISBN: 9781566772419


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ULSI Process Integration 9

ULSI Process Integration 9
Author: C. Claeys
Publisher: The Electrochemical Society
Total Pages: 335
Release: 2015
Genre:
ISBN: 1607686759


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