Plasma Processing of Semiconductors
Author | : P.F. Williams |
Publisher | : Springer Science & Business Media |
Total Pages | : 610 |
Release | : 2013-11-11 |
Genre | : Technology & Engineering |
ISBN | : 9401158843 |
Download Plasma Processing of Semiconductors Book in PDF, Epub and Kindle
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.