Nanophotonic Fabrication

Nanophotonics, a novel optical technology, utilizes the local interaction between nanometric particles via optical near fields. The optical near fields are the elementary surface excitations on nanometric particles, i.e. dressed photons that carry material energy. Of the variety of qualitative innovations in optical technology realized by nanophotonics, this books focuses on fabrication. To fabricate nano-scale photonic devices with nanometer-scale controllability in size and position, we developed a self-assembly method for size- and position-controlled ultra-long nanodot chains using a novel effect of near-field optical desorption. A novel deposition and etching scheme under nonresonant conditions is also demonstrated and its origin is reviewed.

Nanophotonics, a novel optical technology, utilizes the local interaction between nanometric particles via optical near fields. The optical near fields are the elementary surface excitations on nanometric particles, i.e. dressed photons that carry material energy. Of the variety of qualitative innovations in optical technology realized by nanophotonics, this books focuses on fabrication. To fabricate nano-scale photonic devices with nanometer-scale controllability in size and position, we developed a self-assembly method for size- and position-controlled ultra-long nanodot chains using a novel effect of near-field optical desorption. A novel deposition and etching scheme under nonresonant conditions is also demonstrated and its origin is reviewed.

Nanophotonics, a novel optical technology, utilizes the local interaction between nanometric particles via optical near fields. The optical near fields are the elementary surface excitations on nanometric particles, i.e. dressed photons that carry material energy. Of the variety of qualitative innovations in optical technology realized by nanophotonics, this books focuses on fabrication. To fabricate nano-scale photonic devices with nanometer-scale controllability in size and position, we developed a self-assembly method for size- and position controlled ultra long nanodot chains using a novel effect of near-field optical desorption. A novel deposition and etching scheme under nonresonant conditions is also demonstrated and its origin is reviewed.

Fundamentals and Applications of Nanophotonics includes a comprehensive discussion of the field of nanophotonics, including key enabling technologies that have the potential to drive economic growth and impact numerous application domains such as ICT, the environment, healthcare, military, transport, manufacturing, and energy. This book gives readers the theoretical underpinnings needed to understand the latest advances in the field. After an introduction to the area, chapters two and three cover the essential topics of electrodynamics, quantum mechanics, and computation as they relate to nanophotonics. Subsequent chapters explore materials for nanophotonics, including nanoparticles, photonic crystals, nanosilicon, nanocarbon, III-V, and II-VI semiconductors. In addition, fabrication and characterization techniques are addressed, along with the importance of plasmonics, and the applications of nanophotonics in devices such as lasers, LEDs, and photodetectors. Covers electrodynamics, quantum mechanics and computation as these relate to nanophotonics Reviews materials, fabrication and characterization techniques for nanophotonics Describes applications of the technology such as lasers, LEDs and photodetectors

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics

Conventional optical science and technology have been restricted by the diffraction limit from reducing the sizes of optical and photoruc devices to nanometric dimensions. Thus, the size of optical integrated circuits has been incompatible with that of their counterpart, integrated electronic circuits, which have much smaller dimensions. This book provides potential ideas and methods to overcome this difficulty. Near-field optics has developed very rapidly from around the middle 1980s after preliminary trials in the microwave frequency region, as proposed as early as 1928. At the early stages of this development, most technical efforts were devoted to realizing super-high-resolution optical microscopy beyond the diffraction limit. However, the possibility of exploiting the optical near-field, phenomenon of quasistatic electromagnetic interaction at subwavelength distances between nanometric particles has opened new ways to nanometric optical science and technology, and many applications to nanometric fabrication and manipulation have been proposed and implemented. Building on this historical background, this book describes recent progress in near-field optical science and technology, mainly using research of the author's groups. The title of this book, Near-Field Nano-Optics-From Basic Principles to Nano-Fabrication and Nano-Photonics, implies capabilities of the optical near field not only for imaging/microscopy, but also for fabrication/manipulation/proc essing on a nanometric scale.

Edited and authored by leading experts from top institutions in Europe, the US and Asia, this comprehensive overview of micro- and nanophotonics covers the physical and chemical fundamentals, while clearly focusing on the technologies and applications in industrial R&D. As such, the book reports on the four main areas of telecommunications and display technologies; light conversion and energy generation; light-based fabrication of materials; and micro- and nanophotonic devices in metrology and control.

Coauthored by the developer of nanophotonics,this book outlines physically intuitive concepts of the subject using a novel theoretical framework that differs from conventional wave optics. After reviewing the background, history, and current status of research and development in nanophotonics and related technologies, the authors present a unique theoretical model to describe the interactions among nanometric material systems via optical near-fields. They then explore nanophotonic devices and fabrication techniques and provide examples of qualitative innovation. The final chapter looks at how the assembly of nanophotonic devices produces a nanophotonic system.

This book presents the recent progress in the field of nanophotonics. It contains review-like chapters focusing on various but mutually related topics in nanophotonics written by the world’s leading scientists. Following the elaboration of the idea of nanophotonics, much theoretical and experimental work has been carried out, and several novel photonic devices, high-resolution fabrication, highly efficient energy conversion, and novel information processing have been developed in these years. Novel theoretical models describing the nanometric light-matter interaction, nonequilibrium statistical mechanical models for photon breeding processes and near-field‐assisted chemical reactions as well as light‐matter interaction are also explained in this book. It describes dressed photon technology and its applications, including implementation of nanophotonic devices and systems, fabrication methods and performance characteristics of ultrathin, ultraflexible organic light‐emitting diodes, organic solar cells and organic transistors.

Discusses the basic physical principles underlying the science and technology of nanophotonics, its materials and structures This volume presents nanophotonic structures and Materials. Nanophotonics is photonic science and technology that utilizes light/matter interactions on the nanoscale where researchers are discovering new phenomena and developing techniques that go well beyond what is possible with conventional photonics and electronics.The topics discussed in this volume are: Cavity Photonics; Cold Atoms and Bose-Einstein Condensates; Displays; E-paper; Graphene; Integrated Photonics; Liquid Crystals; Metamaterials; Micro-and Nanostructure Fabrication; Nanomaterials; Nanotubes; Plasmonics; Quantum Dots; Spintronics; Thin Film Optics Comprehensive and accessible coverage of the whole of modern photonics Emphasizes processes and applications that specifically exploit photon attributes of light Deals with the rapidly advancing area of modern optics Chapters are written by top scientists in their field Written for the graduate level student in physical sciences; Industrial and academic researchers in photonics, graduate students in the area; College lecturers, educators, policymakers, consultants, Scientific and technical libraries, government laboratories, NIH.