A Study Of Semiconductor Back End Manufacturing

Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.

A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Our economy and future way of life depend on how well American manufacturing managers adapt to the dynamic, globally competitive landscape and evolve their firms to keep pace. A major challenge is how to structure the firms environment so that it attains the speed and low cost of high-volume flow lines while retaining the flexibility and customization potential of a low-volume job shop. The books three parts are organized according to three categories of skills required by managers and engineers: basics, intuition, and synthesis. Part I reviews traditional operations management techniques and identifies the necessary components of the science of manufacturing. Part II presents the core concepts of the book, beginning with the structure of the science of manufacturing and a discussion of the systems approach to problem solving. Other topics include behavioral tendencies of manufacturing plants, push and pull production systems, the human element in operations management, and the relationship between quality and operations. Chapter conclusions include main points and observations framed as manufacturing laws. In Part III, the lessons of Part I and the laws of Part II are applied to address specific manufacturing management issues in detail. The authors compare and contrast common problems, including shop floor control, long-range aggregate planning, workforce planning and capacity management. A main focus in Part III is to help readers visualize how general concepts in Part II can be applied to specific problems. Written for both engineering and management students, the authors demonstrate the effectiveness of a rule-based and data driven approach to operations planning and control. They advance an organized framework from which to evaluate management practices and develop useful intuition about manufacturing systems.

WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

Illuminating the Realm of Semiconductor Manufacturing In the vast landscape of technological progress, few realms have captured the imagination and propelled humanity forward as profoundly as semiconductor manufacturing. From the humble beginnings of vacuum tubes to the marvels of integrated circuits, the art and science of creating microelectronic wonders have revolutionized countless industries, touching every aspect of our modern lives. This book delves into the intricate world of semiconductor manufacturing, shedding light on the secrets hidden within the microscopic structures that power our digital age. It embarks on a journey through the interplay of physics, chemistry, engineering, and innovation, revealing the complex tapestry of processes that transform raw materials into the backbone of our technological advancement. As we venture further into the digital era, the demand for faster, smaller, and more efficient devices continues to surge. The manufacturing of semiconductor chips has become a delicate dance between precision and scale, pushing the boundaries of what was once thought possible. Understanding the intricacies of this process is vital not only for engineers and scientists but for anyone seeking a deeper appreciation of the technological marvels that surround us. Throughout this book, we aim to demystify the fascinating world of semiconductor manufacturing, guiding readers through the fundamental concepts, the challenges faced, and the remarkable achievements attained. We will explore the various stages of semiconductor fabrication, from crystal growth and wafer preparation to photolithography, etching, and deposition, all the way to packaging and testing. Along the way, we will encounter the heroes of this domain—scientists, engineers, and innovators—who have relentlessly pursued breakthroughs, unlocking the secrets that underpin the magic of the semiconductor industry. While the content within these pages is intended to provide a comprehensive overview, it is important to acknowledge that the field of semiconductor manufacturing is a dynamic and ever-evolving one. With each passing day, new discoveries and advancements push the boundaries even further. Therefore, this book aims to serve as a foundation, providing readers with the knowledge and tools to grasp the core principles, while also inspiring them to explore and contribute to the ongoing advancements in this field. Whether you are a curious student embarking on a journey of discovery, a seasoned professional seeking to expand your knowledge, or an enthusiast eager to comprehend the inner workings of the devices that shape our lives, this book will be your guide. Together, let us embark on an illuminating expedition into the realm of semiconductor manufacturing, where the merging of science and engineering enables us to glimpse the boundless possibilities that lie ahead.

This book takes the reader through the actual manufacturing process of making a typical chip, from start to finish, including a detailed discussion of each step, in plain language. The evolution of today's technology is added to the story, as seen through the eyes of the engineers who solved some of the problems. The authors are well suited to that discussion since they are three of those same engineers. They have a broad exposure to the industry and its technology that extends all the way back to Shockley Laboratories, the first semiconductor manufacturer in Silicon Valley. The CMOS (Complementary Metal-Oxide-Semiconductor) process flow is the focus of the discussion and is covered in ten chapters. The vast majority of chips made today are fabricated using this general method. In order to ensure that all readers are comfortable with the vocabulary, the first chapter carefully and clearly introduces the science concepts found in later chapters. A chapter is devoted to pointing out the differences in other manufacturing methods, such as the gallium arsenide technology that produces chips for cell phones. In addition, a chapter describing the nature of the semiconductor industry from a business perspective is included. "The entire process of making a chip is surprisingly easy to understand. The part of the story that defies belief is the tiny dimensions: the conducting wires and other structures on a chip are more than a hundred times thinner than a hair - and getting thinner with every new chip design." Authors are actual engineers who have a broad range of exposure and experience with chip technology Contains a unique chapter describing the nature of the semiconductor industry from a business perspective