Microwave Plasma Enhanced Chemical Vapor Deposition And Structural Characterization Of Diamond Films
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Author | : Wei Zhu |
Publisher | : |
Total Pages | : 530 |
Release | : 1990 |
Genre | : Diamond thin films |
ISBN | : |
Download Microwave Plasma Enhanced Chemical Vapor Deposition and Structural Characterization of Diamond Films Book in PDF, Epub and Kindle
Author | : Kevin John Grannen |
Publisher | : |
Total Pages | : |
Release | : 1994 |
Genre | : |
ISBN | : |
Download Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films Book in PDF, Epub and Kindle
Author | : Saeid Khatami |
Publisher | : |
Total Pages | : 600 |
Release | : 1997 |
Genre | : Diamond thin films |
ISBN | : |
Download Controlled Synthesis of Diamond Films Using a Microwave Discharge (non-equilibrium Plasma) Book in PDF, Epub and Kindle
Author | : Shih-Feng Chou |
Publisher | : |
Total Pages | : 174 |
Release | : 2005 |
Genre | : |
ISBN | : |
Download Synthesis and Characterization of Diamond Thin Films by Microwave Plasma-enhanced Chemical Vapor Deposition (MPECVD) Book in PDF, Epub and Kindle
Diamond thin films are deposited on silicon wafers by MPECVD process with the presence of methane, argon, and hydrogen gases. The reaction chamber is designed with an internal microwave reaction cavity and a high-pressure pocket for improving deposition conditions. Scanning electron microscopy reveals tetrahedral and cauliflower-shaped crystals for polycrystalline diamond and nanocrystalline diamond films, respectively. Spectroscopy ellipsometer studies indicate that diamond-like carbon (DLC) films are deposited with a thickness of 700 nm. Fourier transform infrared spectroscopy shows C-H stretching in the range from 2800 cm -1 to 3000 cm -1 . Nanoindentation is performed on DLC films with an average hardness of 10.98 GPa and an average elastic modulus of 90.32 GPa. The effects of chamber pressure, microwave forward power, and gas mixture on the plasma chemistry are discussed. Substrate temperature has a significant influence on film growth rate, and substrate pretreatment can enhance the quality of diamond films.
Author | : Koji Kobashi |
Publisher | : Elsevier |
Total Pages | : 348 |
Release | : 2005-12-12 |
Genre | : Science |
ISBN | : 9780080447230 |
Download Diamond Films Book in PDF, Epub and Kindle
Discusses the most advanced techniques for diamond growth Assists diamond researchers in deciding on the most suitable process conditions Inspires readers to devise new CVD (chemical vapor deposition Ever since the early 1980s, and the discovery of the vapour growth methods of diamond film, heteroexpitaxial growth has become one of the most important and heavily discussed topics amongst the diamond research community. Kobashi has documented such discussions with a strong focus on how diamond films can be best utilised as an industrial material, working from the premise that crystal diamond films can be made by chemical vapour disposition. Kobashi provides information on the process and characterization technologies of oriented and heteroepitaxial growth of diamond films.
Author | : Jes Asmussen |
Publisher | : CRC Press |
Total Pages | : 658 |
Release | : 2002-01-23 |
Genre | : Technology & Engineering |
ISBN | : 0824743245 |
Download Diamond Films Handbook Book in PDF, Epub and Kindle
The Diamond Films Handbook is an important source of information for readers involved in the new diamond film technology, emphasizing synthesis technologies and diamond film applications. Containing over 1600 references, drawings, photographs, micrographs, equations, and tables, and contributions by experts from both industry and academia, it includes specific chapters that address film characterization methods and the physics and chemistry of film synthesis. Other topics include deposition chemistry, various techniques for diamond synthesis, diamond heat spreaders, thermal management diamond active electronic devices, and diamond film optics.
Author | : Wen-Shin Huang |
Publisher | : |
Total Pages | : 798 |
Release | : 2004 |
Genre | : Chemical vapor |
ISBN | : |
Download Microwave Plasma Assisted Chemical Vapor Deposition of Ultra-nanocrystalline Diamond Films Book in PDF, Epub and Kindle
Author | : |
Publisher | : |
Total Pages | : 480 |
Release | : 1996 |
Genre | : Diamond thin films |
ISBN | : |
Download Diamond Films and Technology Book in PDF, Epub and Kindle
Author | : A.H. Lettington |
Publisher | : Springer |
Total Pages | : 0 |
Release | : 2012-11-05 |
Genre | : Science |
ISBN | : 9789401043120 |
Download Thin Film Diamond Book in PDF, Epub and Kindle
This work, written by leading international authorities, deals with nucleation growth and processing, characterization and electrical, thermal, optical and mechanical properties of thin film diamond. The final chapters are devoted to the broad range of applications of this material.
Author | : Electrochemical Society. Meeting |
Publisher | : The Electrochemical Society |
Total Pages | : 718 |
Release | : 1998 |
Genre | : Technology & Engineering |
ISBN | : 9781566771856 |
Download Proceedings of the Fifth International Symposium on Diamond Materials Book in PDF, Epub and Kindle