Low Pressure Chemical Vapor Deposition Lpcvd Of Titanium Nitride
Download and Read Low Pressure Chemical Vapor Deposition Lpcvd Of Titanium Nitride full books in PDF, ePUB, and Kindle. Read online free Low Pressure Chemical Vapor Deposition Lpcvd Of Titanium Nitride ebook anywhere anytime directly on your device. We cannot guarantee that every ebooks is available!
Author | : Sameer Narsinha Dharmadhikari |
Publisher | : |
Total Pages | : 110 |
Release | : 1999 |
Genre | : Chemical vapor deposition |
ISBN | : |
Download Low Pressure Chemical Vapor Deposition (LPCVD) of Titanium Nitride Book in PDF, Epub and Kindle
Titanium tetrachioride and ammonia were used as precursors in a Jow pressure chemical vapor deposition process to deposit titanium nitride films on silicon wafers. The process was carried out at temperatures from 450 to 850°C and the activation energy for the reaction was determined. The order of the reaction, with respect to the partial pressures of the reactant gases, was determined by carrying out the reaction at varying partial pressures of the reactant gases. The following rate equation was established for the reaction: rate = 4.35*10-5exp( -5150/T)*(PNH3)1.37(PTicl4)-0.42 The titanium nitride thin films deposited were characterized for properties like resistivity, stress, hardness, and density. The effects of varying the process parameters (temperature, flow ratio, etc.) on these film properties were studied.
Author | : Joshua N. Musher |
Publisher | : |
Total Pages | : 308 |
Release | : 1994 |
Genre | : Chemical vapor deposition |
ISBN | : |
Download Atmospheric Pressure Chemical Vapor Deposition of Titanium Nitride Book in PDF, Epub and Kindle
Author | : Jianwen Zhu |
Publisher | : |
Total Pages | : 172 |
Release | : 1992 |
Genre | : Dielectric films |
ISBN | : |
Download Design and Implementation of a Low Pressure Chemical Vapor Deposition System for Polysilicon and Silicon Nitride Book in PDF, Epub and Kindle
Author | : Vida Ilderem |
Publisher | : |
Total Pages | : 202 |
Release | : 1985 |
Genre | : |
ISBN | : |
Download Low Pressure Chemical Vapor Deposition of Titanium Silicide Book in PDF, Epub and Kindle
Author | : Hsiao C. Liu |
Publisher | : |
Total Pages | : 36 |
Release | : 1991 |
Genre | : |
ISBN | : |
Download Setup of Low Pressure Chemical Vapor Deposition of Boron Nitride Thin Films Book in PDF, Epub and Kindle
Author | : David L. Pearson |
Publisher | : |
Total Pages | : 122 |
Release | : 1977 |
Genre | : |
ISBN | : |
Download Low-pressure Chemical Vapor Deposition of Silicon Nitride Book in PDF, Epub and Kindle
Author | : Jaegab Lee |
Publisher | : |
Total Pages | : 270 |
Release | : 1991 |
Genre | : |
ISBN | : |
Download A Low Pressure Chemical Vapor Deposition Process for Titanium Disilicide Films with and Without Plasma Enhancement Book in PDF, Epub and Kindle
Author | : Vida Ilderem |
Publisher | : |
Total Pages | : 458 |
Release | : 1988 |
Genre | : |
ISBN | : |
Download A Very Low Pressure Chemical Vapor Deposition Process for Blanket and Selective Titanium Silicide Films Book in PDF, Epub and Kindle
Author | : Xin Lin |
Publisher | : |
Total Pages | : 242 |
Release | : 1995 |
Genre | : Silicon nitride |
ISBN | : |
Download Low Pressure Chemical Vapor Deposition of Silicon Nitride Films from Tridimethylaminosilane Book in PDF, Epub and Kindle
Author | : Xiangqun Fan |
Publisher | : |
Total Pages | : 120 |
Release | : 1994 |
Genre | : Chemical vapor deposition |
ISBN | : |
Download Low Pressure Chemical Vapor Deposition of Silicon Nitride Films from Ditertiarybutylsilane Book in PDF, Epub and Kindle