Development Of Terahertz Quantum Cascade Lasers As Sources For Heterodyne Receivers

Quantum cascade lasers (QCLs) are attractive for high-resolution spectroscopy because they can provide high power and a narrow linewidth. They are particularly promising in the terahertz (THz) range since they can be used as local oscillators for heterodyne detection as well as transmitters for direct detection. However, THz QCL-based technologies are still under development and are limited by the lack of frequency tunability as well as the frequency and output power stability for free-running operation. In this dissertation, frequency tuning and linewidth of THz QCLs are studied in detail by using rotational spectroscopic features of molecular species. In molecular spectroscopy, the Doppler eff ect broadens the spectral lines of molecules in the gas phase at thermal equilibrium. Saturated absorption spectroscopy has been performed that allows for sub-Doppler resolution of the spectral features. One possible application is QCL frequency stabilization based on the Lamb dip. Since the tunability of the emission frequency is an essential requirement to use THz QCL for high-resolution spectroscopy, a new method has been developed that relies on near-infrared (NIR) optical excitation of the QCL rear-facet. A wide tuning range has been achieved by using this approach. The scheme is straightforward to implement, and the approach can be readily applied to a large class of THz QCLs. The frequency and output stability of the local oscillator has a direct impact on the performance and consistency of the heterodyne spectroscopy. A technique has been developed for a simultaneous stabilization of the frequency and output power by taking advantage of the frequency and power regulation by NIR excitation. The results presented in this thesis will enable the routine use of THz QCLs for spectroscopic applications in the near future.

The terahertz (THz) frequency range (300 GHz to 10 THz, wavelength 30-1000 [mu]m), despite having many potential applications, is technologically relatively underdeveloped mainly because of the lack of suitable coherent radiation sources when compared with nearby electromagnetic radiation spectrum. The invention of the THz quantum cascade laser, a electronically-pumped semiconductor heterostructure which emits photons from electronic intersubband transitions, provides the first solidstate fundamental oscillator at the frequency range from 1.2 to 5.1 THz. Due to the subwavelength confinement nature of the metal-metal waveguide used in most of the THz QC lasers, far-field beam patterns from lasers with simple Fabry-Perot waveguides are divergent and far from ideal Gaussian beams. The first part of this thesis describes the development of single-mode THz QC lasers on metal-metal waveguides. Starting with the corrugated third-order DFB laser-a clever laser structure which utilizes end-fire array effect to achieve low divergence beam patterns-several applications using densely-packed third-order DFB laser arrays, such as frequency agile sources for THz swept-source optical tomography and local oscillators for THz heterodyne receivers with precise frequency control, have been investigated. With the improved design rules and fabrication techniques, 830 GHz single-mode frequency coverage on a monolithic multicolor DFB laser array has been achieved. The origin of the deterioration in far-field beam patterns and power outputs in long third-order DFB lasers is then identified. This finding leads to a modified third-order DFB laser structure which can achieve perfect phase-matching (PM) condition, resulting in scalable power output and even lower beam divergence when compared with that of a conventional third-order DFB laser. Radiations from up to 151 laser sectors are phase-locked to form a single-lobe beam pattern with divergence ~ 6 x 11° and ~13 mW pulsed power at the end-fire direction. This approach substantially increases the usable length of a third-order DFB laser while keeping a high slope efficiency (140 mW/A). Later development applies the concept of microstrip antenna-a structure commonly used in microwave engineering-to THz photonics devices. By coupling the microstrip antenna to each grating aperture of a perfectly phase-matched DFB laser, the radiation impedance of the laser can now be tuned to enhance the overall emission efficiency. This novel genre of DFB laser achieves > 8 mW pulsed power (10% duty-cycle) at 12 K with beam divergence as low as 12.5 x 12.5' and maximum lasing temperature Tmax = 109 K (pulsed) and 77 K (c.w.) with the highest slope efficiency (~450 mW/A) and wall-plug efficiency (0.57%) of all THz DFB laser sources. The second part of the thesis then focuses on the development of the first light amplifier in THz frequency under Fabry-Perot amplifier (FPA) scheme. Although amplification at terahertz frequency in quantum cascade structures has been demonstrated under the transient state or in a integrated platform, none of them is suitable for amplifying continuous-wave free-space THz radiations. The proposed amplifier is consisted of an array of short-cavity surface-emitting second-order distributed feedback lasers arranged in a two-dimensional grid which are operated marginally beneath their lasing thresholds. A overall system power gain of ~5.6x = 7.5 dB at ~3 THz is obtained with ~1 GHz bandwidth. The free-space THz light amplifier can be used as the pre-amplifier for a THz heterodyne receiver system to reduce the receiver system noise, or be placed on the focal plane of a THz imaging system to enhance the signal-to-noise ratio of the image and reduce the acquisition time. A new locking mechanism for two-dimensional phase-locked laser arrays based on antenna mutual-coupling is also proposed and then successfully demonstrated in the THz frequency using short-cavity DFB THz lasers. Up to 37 lasers are phase-locked to deliver 6.5 mW single-mode pulsed power (4% duty-cycle) at 3 THz with symmetric beam pattern ( 10 x 10°). This new coupling scheme can be extended to other electromagnetic systems with sub-wavelength confined elements such as plasmonic lasers and nanolasers. This thesis also reports the development of fabrication techniques required to bring the aforementioned novel THz cavity designs from concepts to reality which include a high aspect ratio ( 1:10) anisotropic reactive-ion etch on GaAs which is compatible with the metal-metal waveguide platform and the procedure to create airbridge structures by selectively removing the dielectric materials beneath the metal contacts.

The terahertz or the far-infrared frequency range of the electromagnetic spectrum (...) has historically been technologically underdeveloped despite having many potential applications, primarily due to lack of suitable sources of coherent radiation. Following on the remarkable development of mid-infrared (...) quantum-cascade lasers (QCLs) in the past decade, this thesis describes the development of electrically-pumped terahertz quantum-cascade lasers in GaAs/AlsGal_. As heterostructures that span a spectral range of 1.59 - 5.0 THz (...). A quantum-cascade laser (QCL) emits photons due to electronic intersubband transitions in the quantum-wells of a semiconductor heterostructure. The operation of terahertz QCLs at frequencies below the Reststrahlen band in the semiconductor (...), is significantly more challenging as compared to that of the mid-infrared QCLs. Firstly, due to small energy separation between the laser levels various intersubband scattering mechanisms are activated, which make it difficult to selectively depopulate the lower laser level. Additionally, as electrons gain enough kinetic energy in the upper laser level thermally activated longitudinal-optical (LO) phonon scattering reduces the level lifetime and makes it difficult to sustain population inversion at higher temperatures. Secondly, waveguide design for terahertz mode confinement is also more challenging due to higher free-carrier losses in the semiconducting doped regions at the terahertz frequencies. For successful designs reported in this work, the lower radiative state depopulation is achieved by a combination of resonant-tunneling and fast LO phonon scattering, which allow robust operation even at relatively high temperatures. An equally important enabling mechanism for these lasers is the development of metal-metal waveguides, which provide low waveguides losses, and strong mode confinement due to subwavelength mode localization in the vertical dimension. With these techniques some record performances for terahertz QCLs are demonstrated including the highest pulsed operating temperature of 169 K, the highest continuous-wave (cw) operating temperature of 117 K, and the highest optical power output (248 mW in pulsed and 138 mW in cw at 5 K) for any terahertz QCL. Towards the bigger goal of realizing a 1-THz solid-state laser to ultimately bridge the gap between electronic and optical sources of electromagnetic radiation, QCLs with a unique one-well injection scheme, which minimizes intersubband absorption losses that occur at longer wavelengths, are developed. Based on this scheme a QCL operating at 1.59 THz (A - 189 ym) is realized, which is amongst the lowest frequency solid-state lasers that operate without the assistance of a magnetic field. This thesis also reports on the development of distributed-feedback lasers in metal-metal waveguides to obtain single-mode operation, with greater output power and better beam quality. The subwavelength vertical dimension in these waveguides leads to a strongly coupled DFB action and a large reflection from the end-facets, and thus conventional coupled-mode theory is not directly applicable to the DFB design. A design technique with precise control of phase of reflection at the end-facets is developed with the aid of finite-element analysis, and with some additional unique design and fabrication methods, robust DFB operation has been obtained. Single-mode surface-emitting terahertz QCLs operating up to - 150 K are demonstrated, with different grating devices spanning a range of approximately 0.35 THz around v - 3 THz using the same gain medium. A single-lobed far-field radiation pattern, higher output power due to surface-emission, and a relatively small degradation in temperature performance compared to the Fabry-Perot ridge lasers makes these DFB lasers well suited for practical applications that are being targeted by the terahertz quantum-cascade lasers.

Learn how the rapidly expanding area of mid-infrared and terahertz photonics has been revolutionized in this comprehensive overview. State-of-the-art practical applications are supported by real-life examples and expert guidance. Also featuring fundamental theory enabling you to improve performance of both existing and future devices.

Terahertz waves, which lie in the frequency range of 0.1-10 THz, have long been investigated in a few limited fields, such as astronomy, because of a lack of devices for their generation and detection. Several technical breakthroughs made over the last couple of decades now allow us to radiate and detect terahertz waves more easily, which has trigg

Terahertz (THz) quantum-cascade lasers (QCLs) are an emerging semiconductor source of compact, high-power THz radiation. Though first realized more than 15 years ago, THz QCLs continue to suffer from poor beam quality and outcoupling efficiency due to the subwavelength nature of the semiconductor ridge-waveguides typically used. In this thesis, a new technique is discussed for obtaining high power and good beam quality from THz QCLs, the THz quantum-cascade external cavity surface emitting laser (QC-VECSEL). The concept of the QC-VECSEL is to use THz QC-gain material to design a millimeter-scale reflective amplifying surface, or metasurface, for free space THz waves and incorporate it into a free-space THz resonant cavity to provide feedback to the amplification and form a laser. In this manner, the beam shape is determined by the external cavity, which supports fundamental Gaussian solutions. Further, the metasurface itself is composed of a subwavelength array (to prevent diffraction) of surface-coupled QC-elements whose properties, such as phase and polarization response, can be engineered on a unit cell basis allowing for a variety of unique experiments. The power output power of the QC-VECSEL can be scaled by either increasing the size of the metasurface, or increasing the density (or fill factor) of QC-elements across the surface. In this work, large area metasurfaces with high fill-factor have been studied and demonstrated up to 1.35 W of peak output power for a QC-VECSEL operating at 3.4 THz at a heat sink temperature of 4 K. A peak wall-plug efficiency of ~2% is demonstrated, but observation of self lasing from the metasurface at high bias (when no external cavity is provided) in combination with a simultaneous roll-off in VECSEL output power suggests even higher efficiency can be achieved with improved suppression of self-lasing modes. The output beam is well fit to a Gaussian distribution with a 4 degree full-width half-maximum divergence angle. In addition to power and beam quality, the QC-VECSEL opens the door to many interesting and unique studies via engineering of the metasurface properties and external cavity. Much of this thesis describes frequency tuning of QC-VECSELs based on broadband metasurfaces by varying the length of the external cavity. By making the external cavity extremely short (comparable to the operating wavelength), we are able to push all other external cavity modes outside of the gain bandwidth of the metasurface and demonstrate more than 20% fractional single-mode tuning around a center operating frequency of 3.5 THz. Because there are almost no diffraction losses at such a short cavity, the size of the metasurface could be reduced, allowing for continuous wave lasing with up to 20 milliwatts of output power at a heatsink temperature of 77 K, though the output power is highly variable as the reflectance of the output coupler has a strong frequency dependence. At the time of writing this, these are record performances in both frequency tuning and high-temperature continuous wave operation for lasers based on THz QC-gain material. The amount of tuning that be achieved with this approach is limited by the phase response of the metasurface, which squeezes the external cavity modes closer together in the spectral domain. Development of metasurfaces with lower electrical power consumption and higher conversion efficiency for the purpose of improving continuous wave performance. A sparse, patch-based metasurface with reduced power consumption is demonstrated, though the design was not optimal and only showed a 20% reduction in current draw compared to the previously demonstrated metasurfaces. Routes towards improving the performance are discussed. The last subject discussed is the design of a mid-infrared (IR) QC-VECSEL. Due to the large metal losses at mid-IR frequencies compared to THz, the technique used to develop THz QC-VECSELs cannot be directly extended to the mid-IR. We propose a scheme based on a diffraction grating to provide surface coupling of the QC-gain material. Progress on experimental realization is discussed, but lasing has not yet been observed.

One of the most important applications for Terahertz (THz) quantum cascade (QC) lasers is to provide compact and powerful frequency-stabilized solid-state sources as local oscillators in heterodyne receivers for astronomical studies. The first part of the thesis is dedicated to the device cavity design, fabrication and characterization of the microstrip antenna coupled third-order distributed feedback QC lasers aimed for 2.060 THz atomic oxygen line. THz travelling-wave QC amplifiers are highly desired to achieve broadband amplification of THz radiation in free space. The second part of the thesis focuses on the development of 4.3 THz travelling-wave QC amplifier by monolithically integrating horn antennas and attaching silicon lenses at the metal-metal waveguide facets.

We demonstrate an ultra-compact Terahertz (THz) heterodyne detec- tion system based on a quantum cas- cade laser (QCL) as local oscillator and a hot electron bolometer (HEB) for the mixing. It relies on a new opti- cal coupling scheme where the local oscillator signal is coupled through the air side of the planar HEB an- tenna, while the signal to be de- tected is coupled to the HEB through the lens. This technique allows us to suppress the beam splitter usu- ally employed for heterodyne mea- surements. The mixer is a Niobium Nitride HEB with a log-spiral planar antenna on silicon and mounted on the back of a plano-convex silicon lens. We have developed a low power consumption and low beam di- vergence 3rd-order distributed feed- back laser with single mode emis- sion at the target frequency of 2.7 THz to be used as local oscillator for the heterodyne receiver. The cou- pling between the QC laser and the the HEB has been further optimized, using a dielectric hollow waveguide that reliably increases the laser beam directivity up to 55 dBi. Upon the high beam quality, sufficient output power in a single mode at the tar- geted frequency and low power dissi- pation of our local oscillator, we have build an ultra compact THz hetero- dyne receiver with sensitivity close to the state of the art at 2.7 THz.