Conductive Atomic Force Microscopy

The first book to summarize the applications of CAFM as the most important method in the study of electronic properties of materials and devices at the nanoscale. To provide a global perspective, the chapters are written by leading researchers and application scientists from all over the world and cover novel strategies, configurations and setups where new information will be obtained with the help of CAFM. With its substantial content and logical structure, this is a valuable reference for researchers working with CAFM or planning to use it in their own fields of research.

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.

Atomic force microscopy (AFM) has become an important tool for materials research. In this book, the basic principles of functional AFMs and their applications in energy materials such as lithium batteries, electrochemical catalysis, solar cells, and other energy-related materials are addressed.

Since 1995, the noncontact atomic force microscope (NC-AFM) has achieved remarkable progress. Based on nanomechanical methods, the NC-AFM detects the weak attractive force between the tip of a cantilever and a sample surface. This method has the following characteristics: it has true atomic resolution; it can measure atomic force interactions, i.e. it can be used in so-called atomic force spectroscopy (AFS); it can also be used to study insulators; and it can measure mechanical responses such as elastic deformation. This is the first book that deals with all of the emerging NC-AFM issues.

This book focuses primarily on the atomic force microscope and serves as a reference for students, postdocs, and researchers using atomic force microscopes for the first time. In addition, this book can serve as the primary text for a semester-long introductory course in atomic force microscopy. There are a few algebra-based mathematical relationships included in the book that describe the mechanical properties, behaviors, and intermolecular forces associated with probes used in atomic force microscopy. Relevant figures, tables, and illustrations also appear in each chapter in an effort to provide additional information and points of interest. This book includes suggested laboratory investigations that provide opportunities to explore the versatility of the atomic force microscope. These laboratory exercises include opportunities for experimenters to explore force curves, surface roughness, friction loops, conductivity imaging, and phase imaging.

The first book to summarize the applications of CAFM as the most important method in the study of electronic properties of materials and devices at the nanoscale. To provide a global perspective, the chapters are written by leading researchers and application scientists from all over the world and cover novel strategies, configurations and setups where new information will be obtained with the help of CAFM. With its substantial content and logical structure, this is a valuable reference for researchers working with CAFM or planning to use it in their own fields of research.

This book represents the compilation of papers presented at the second Atomic Force Microscopy/Scanning Tunneling Microscopy (AFM/STM) Symposium, held June 7 to 9, 1994, in Natick, Massachusetts, at Natick Research, Development and Engineering Center, now part ofU.S. Army Soldier Systems Command. As with the 1993 symposium, the 1994 symposium provided a forum where scientists with a common interest in AFM, STM, and other probe microscopies could interact with one another, exchange ideas and explore the possibilities for future collaborations and working relationships. In addition to the scheduled talks and poster sessions, there was an equipment exhibit featuring the newest state-of-the-art AFM/STM microscopes, other probe microscopes, imaging hardware and software, as well as the latest microscope-related and sample preparation accessories. These were all very favorably received by the meeting's attendees. Following opening remarks by Natick's Commander, Colonel Morris E. Price, Jr., and the Technical Director, Dr. Robert W. Lewis, the symposium began with the Keynote Address given by Dr. Michael F. Crommie from Boston University. The agenda was divided into four major sessions. The papers (and posters) presented at the symposium represented a broad spectrum of topics in atomic force microscopy, scanning tunneling microscopy, and other probe microscopies.

This edition updates the survey of the many rapidly developing subjects concerning the mapping of a variety of forces across surfaces, including basic theory, instrumentation, and applications. It also includes important new research in STM and a thoroughly revised bibliography.

Atomic force microscopes are very important tools for the advancement of science and technology. This book provides an introduction to the microscopes so that scientists and engineers can learn both how to use them, and what they can do.