Amorphous Hydrogenated Carbon Films With Diamond Like And Polymer Like Properties

Results of the study of structural features and optical properties of thin films of amorphous hydrogenated carbon (a-C:H) films prepared by plasma-activated chemical vapor deposition of various hydrocarbon precursors are reviewed. The effect of different factors on the rate of a-C:H films deposition in a DC glow discharge with the magnetron plasma localized near the anode such as voltage, discharge power, gas pressure, relative content of an inert gas in the mixture with a hydrocarbon and other is analyzed. It is shown that the refractive index of a-C:H films can be changed in the interval 2.35-1.55 by increasing the deposition rate and the choice of the appropriate hydrocarbon precursor. The features of the vibration spectra of the diamond-like and polymer-like films are discussed. The correlations of the structural peculiarities and of the optical absorption edge, gap width, and conductivity as well as the absorption spectra in visible region and the ratio of the fundamental bands in Raman scattering spectra are estimated. Examples of using the optical properties of the a-C:H films are given.

Amorphous, hydrogenated carbon (AHC) films can be deposited on various substrates using several techniques, e.g. plasma deposition and ion beam deposition. The resulting films can be hard, wear resistant and transparent.

World experts in amorphous carbon have been drawn together to produce this comprehensive commentary on the current state and future prospects of amorphous carbon, a highly functional material. Amorphous carbon has a wide range of properties that are primarily controlled by the different bond hybridisations possible in such materials. This allows for the growth of an extensive range of thin films that can be tailored for specific applications. Films can range from those with high transparency and which are hard and diamond-like, through to those which are opaque, soft and graphitic-like. Application areas including field emission cathodes, MEMs, electronic devices, medical and optical coatings are now close to market.

This book presents current research from across the globe in the study of diamond-like carbon films. Topics discussed include the peculiarities of ion-beam synthesis of carbon-based phases; electron field emission properties of non-metal and metal doped diamond like carbon; internal stress and its reduction of hydrogenated diamond-like carbon thin films deposited by plasma CVD methods; incorporating crystalline diamond particles in diamond-like carbon films to improve their properties and diamond-like carbon films applied as an alignment layer for LCDs.

This book highlights some of the most important structural, chemical, mechanical and tribological characteristics of DLC films. It is particularly dedicated to the fundamental tribological issues that impact the performance and durability of these coatings. The book provides reliable and up-to-date information on available industrial DLC coatings and includes clear definitions and descriptions of various DLC films and their properties.

This book presents the status quo of the structure, preparation, properties and applications of tetrahedrally bonded amorphous carbon (ta-C) films and compares them with related film systems. Tetrahedrally bonded amorphous carbon films (ta-C) combine some of the outstanding properties of diamond with the versatility of amorphous materials. The book compares experimental results with the predictions of theoretical analyses, condensing them to practicable rules. It is strictly application oriented, emphasizing the exceptional potential of ta-C for tribological coatings of tools and components.