Advanced Interconnects And Contacts Volume 564

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Finding new materials for copper/low-k interconnects is critical to the continuing development of computer chips. While copper/low-k interconnects have served well, allowing for the creation of Ultra Large Scale Integration (ULSI) devices which combine over a billion transistors onto a single chip, the increased resistance and RC-delay at the smaller scale has become a significant factor affecting chip performance. Advanced Interconnects for ULSI Technology is dedicated to the materials and methods which might be suitable replacements. It covers a broad range of topics, from physical principles to design, fabrication, characterization, and application of new materials for nano-interconnects, and discusses: Interconnect functions, characterisations, electrical properties and wiring requirements Low-k materials: fundamentals, advances and mechanical properties Conductive layers and barriers Integration and reliability including mechanical reliability, electromigration and electrical breakdown New approaches including 3D, optical, wireless interchip, and carbon-based interconnects Intended for postgraduate students and researchers, in academia and industry, this book provides a critical overview of the enabling technology at the heart of the future development of computer chips.

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Papers in this volume are from the 199th ECS Meeting, held in Washington, DC, Spring 2001. Morphology evolution encompasses electrochemical processing in ULSI fabrication, shape evolution, growth habit, and microstructure of electrodeposits. The most prominent example at present is the electrochemical deposition of copper for ULSI interconnects. Many other electrochemical processes at various stages of emergence and development hold promise for the electronics industry and beyond.

One of the goals of materials science is to design alloys with pre-specified desirable technological properties. To achieve this goal, it is necessary to have a thorough understanding of the fundamental mechanisms underlying materials behavior. In particular, one must understand the effects on alloy properties caused by intentional changes in concentration and how the combinations of temperature, time and uncontrollable foreign impurities affect microstructure. In addition to the equilibrium phase information contained in phase diagrams, nonequilibrium dynamic processes and metastable phases are known to be crucial in determining materials properties. This volume brings together researchers working on various aspects of nonequilibrium processes in materials to discuss current research issues and to provide guidelines for future work. Particular attention was paid to understanding particle nucleation and growth, both experimentally and theoretically, solid-state reactions, nanosystems, liquid-solid transformations, and solidification and amorphization. On the theoretical side, fundamental principles governing nucleation and growth, and related phenomena such as coarsening and Ostwald ripening, are discussed. Progress is also reported on the phase field method and on Monte Carlo simulations.

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2000, concentrates on the preparation and processing of interfaces, the relationships between chemistry and structure and the properties and behavior of interfaces, particularly in relation to strength and bonding.

The field of organic optical materials is rapidly growing, and advances are being made both in attaining a deeper understanding of device phenomena and in designing improved materials for thin films, fibers and waveguides. This book offers an interdisciplinary discussion of research on electronic and photonic devices made with organic and polymeric materials. The 1999 MRS Spring Meeting was highlighted by several major advances in fields ranging from nonlinear absorbers and electro-optic polymers, to photorefractive polymers, organic transistors and electroluminescent materials and devices for displays. This book highlights developments in materials chemistry and physics relevant to such devices and strikes a balance between basic science and technology. Topics include: nonlinear optical materials; photorefractive polymers; and electronic and light-emitting materials.